Introduction of Hitachi's Latest FE-SEM and Atmospheric SEM

This is a 2-part seminar by Hitachi.

Presenter: Atsushi Miyaki  

Time: 14:30-15:00

Introduction of Hitachi's Latest Innovative Technology in FE-SEM 

観察と分析能力を両立した最新コールドFE-SEM　SU8200のご紹介

Abstract:

With the release of the first commercially available CFE-SEM in 1972, Hitachi's innovative SEMs have contributed extensively to major technological advances in microelectronics, materials science, medical research and industrial manufacturing for over 40 years.  Today, Hitachi's innovation continues with the introduction of the SU8200 series FE-SEM, which is the culmination of decades of experience, research, and ongoing technology development.  The result is the ultimate FE-SEM with high performance beam brightness and stability, providing ultra-high resolution imaging and high quality elemental analysis at low accelerating voltage.

電界放出形走査電子顕微鏡SU8200シリーズは、高輝度で安定した状態を長く維持できる新型電子銃を搭載しました。さらにセミインレンズによる超高分解能観察と、多種の信号検出系による二次電子/反射電子信号可変機能を用いることで，低加速電圧での観察と分析の両立を実現しました。今回はSU8200の各種機能によるアプリケーション例をご紹介します。

Time: 15:00-15:30

Introduction of Hitachi's Atmospheric SEM 

大気圧から真空まで観察できる新しい世界  ～AeroSurf1500のご紹介～

Abstract:

We developed the desktop type of new concept SEM which is possible to observe samples under atmospheric pressure.  We can observe bulk specimen including the moisture under atmospheric pressure.  Because this instrument has a very thin membrane which can separate evacuated column and atmospheric pressure chamber.  In this time, we explain the principle and features about this instruments, and then we show a soft-material and biological samples application data by use of this instrument

大気圧下でSEM観察が可能な卓上型大気圧SEMを開発しました。大気-真空を分離する隔膜と観察試料とが非接触な状態にすることが可能のため、水分を含んだバルク試料を大気圧下でSEM観察することができます。今回は、本装置の原理や特長をご説明し、ソフトマテリアル材や生体材料、生物試料の観察例についてご紹介します。