The Provost Lecture Series 20

Date: Friday, September 12, 2025

Speaker: Professor Tsumoru Shintake, Quantum Wave Microscopy Unit

Title: OIST EUV Lithography invention makes mobile phone chip fabrication easier and faster

Abstract:

This is a good example: 'Classical optics works very well', which is the scope of B11 classes for students. This is applied science, not quantum mechanics. Today's advanced chips, like those in your mobile phone, use extreme ultraviolet light to print logic circuit patterns with nanometre resolution onto the wafer. Current ASML technology uses 1 megawatt of AC power and is extremely expensive. It costs around 200 million euros. The OIST invention is ten times more efficient, i.e. consuming less than 100 kW and costs less than 50 million euros. We are developing this technology, which will be tested at Lab5 soon.

Chair: Professor Matthias Wolf, Molecular Cryo-Electron Microscopy Unit

Venue: Sydney Brenner Lecture Theater B250

Time:
14:00-15:00: Introduction, Lecture and Q&A
15:00-15:30: Teatime

Seminar video is not available.

The Provost Lecture Series will provide an opportunity to celebrate milestones in the careers of OIST faculty members. It will recognize newly promoted professors and those who have received prestigious awards. It will highlight faculty achievements and create a space for retiring professors to talk about their research accomplishments and lessons learned over the course of their career. It is a way to celebrate OIST faculty, introduce them to the broader OIST community, acknowledge their research successes, share about their teaching and mentorship of students, and honor their service to the university.

Contact: Office of the Provost　Email: provost_office@oist.jp